fluid model of inductively coupled plasma etcher based on (COMSOL Inc)
90
Structured Review
COMSOL Inc
fluid model of inductively coupled plasma etcher based on
Fluid Model Of Inductively Coupled Plasma Etcher Based On, supplied by COMSOL Inc, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/product/fluid+model+of+inductively+coupled+plasma+etcher+based+on/fluid+model+of+inductively+coupled+plasma+etcher+based+on/ppr0941809-397-6-17
Average 90 stars, based on 1 article reviews
Fluid Model Of Inductively Coupled Plasma Etcher Based On, supplied by COMSOL Inc, used in various techniques. Bioz Stars score: 90/100, based on 1 PubMed citations. ZERO BIAS - scores, article reviews, protocol conditions and more
https://www.bioz.com/product/fluid+model+of+inductively+coupled+plasma+etcher+based+on/fluid+model+of+inductively+coupled+plasma+etcher+based+on/ppr0941809-397-6-17
Average 90 stars, based on 1 article reviews
fluid model of inductively coupled plasma etcher based on - by Bioz Stars,
2026-11
90/100 stars
Images
Related Articles
Clinical Proteomics:Article Title: 1D Modelling and Diagnostics of Low-Pressure Capacitively Coupled Radio-Frequency Argon Plasma Article Snippet: .. Jia C, Linhong J, Yu Z, Yixiang S. Fluid model of inductively coupled Article Title: Simulation of Light Intensity of VUV Lamp Based on Inductively Coupled Plasma Discharge in Low-pressure Kr-He Mixture Article Snippet: The vacuum ultraviolet (VUV) light source derived from the Kr-He discharge is widely used for organic analysis, however the relevant model that greatly facilitates the design of high-performance VUV light sources remains to be developed.. This study explores a model for simulating the light intensity of the VUV lamps based on the inductively coupled plasma (ICP) discharge in the low-pressure Kr-He mixture.. Two typical ICP based light sources, i.e., a 13.56 MHz VUV lamp with an external coil and a 2.65 MHz VUV lamp with an internal coil, were successfully simulated with the COMSOL Multiphysics software coupled with a fluid model. Article Title: Simulation of a large size inductively coupled plasma generator and comparison with experimental data Article Snippet: .. 26 |